Electrodeposition of Ru onto Ru and Au Seed Layers from Solutions of Ruthenium Nitrosyl Sulfate and Ruthenium Chloride

The electrodeposition of Ru was investigated from solutions ruthenium(III) nitrosyl sulfate and chloride onto seed layers epitaxial polycrystalline Au. Using both galvanostatic potentiostatic deposition modes, metallic found to electrodeposit as a porous layer comprised (0001) oriented crystallites, the presence which discovered confirmed by X-ray scanning transmission electron microscope (S/TEM) analyses. This finding independent salt used. reflectivity (XRR), average film density ρ e f electrodeposited measured less than bulk }_{Ru,bulk}$?> R u , b l k (14.414 g cm −3 ). Increasing magnitude applied current −100 μ A −2 −10 mA in increased 7.4 9.7 while efficiency decreased 9.4% 4.3%.